Inpower Qhuav semiconductor lub tshuab nqus tsev twj yog cov twj tshwj xeeb siv hauv kev lag luam semiconductor los tsim lub tshuab nqus tsev huv thiab qhuav. Cov twj no yog qhov tseem ceeb rau cov txheej txheem xws li tshuaj vapor deposition, lub cev vapor deposition, ion implantation, thiab etching.
Technical parameters:
|
Qauv |
GXR 110 |
GXR 180 |
GXR 320 |
GXR400 |
|
|
SPEED (50Hz) |
m³/h |
110 |
180 |
320 |
400 |
|
Qhov kawg nqus tsev vacuum (50Hz) |
Pa |
Tsawg dua los yog sib npaug li 1 |
Tsawg dua los yog sib npaug li 1 |
Tsawg dua los yog sib npaug li 1 |
Tsawg dua los yog sib npaug li 1 |
|
Hwj chim (50Hz) |
Kw |
4.5 |
7.5 |
7.5 |
7.5 |
|
Forced internal ncig cua txias |
GXR yog txawm peem rau nrog ib tug yuam kev nyob rau hauv lub voj voog txias, nrog lub siab tshaj plaws twj tso kua mis lub cev kub ntawm<50 ° C and a maximum motor temperature of<35 ° C |
||||
|
Voltage thiab zaus |
Haum rau lub ntiaj teb voltage thiab zaus |
||||
|
Inlet / qhov hluav taws xob interface |
Customizable flange interface / KF interface |
||||
|
Dej |
Siab (MPa) |
0.2-0.4 |
|||
|
Flow L/min |
3-5 |
||||
|
Qib (degree) |
10-30 |
||||
|
N2 |
Siab (MPa) |
0.05-0.1 |
|||
|
Flow L/min |
6-20 |
||||
|
Suab nrov |
dB |
Tsawg dua lossis sib npaug li 68 |
Tsawg dua lossis sib npaug li 68 |
Tsawg dua los yog sib npaug li 70 |
Tsawg dua los yog sib npaug li 70 |
|
Qhov hnyav |
Kg |
280 |
360 |
360 |
420 |
|
Saib xyuas thiab tswj |
Tswj vaj huam sib luag / nqus cov duab digital / ntsuas kub / ntsuas tam sim no / tswb ceeb toom / lwm yam kev pabcuam hauv network |
||||
|
Qauv |
GXR 180/800 |
GXR 180/1300 |
GXR 180/1800 |
GXR450/2600 |
|
|
SPEED (50Hz) |
m³/h |
800 |
1300 |
1800 |
2600 |
|
Qhov kawg nqus tsev vacuum (50Hz) |
Pa |
Tsawg dua los yog sib npaug rau 0.1 |
Tsawg dua los yog sib npaug rau 0.1 |
Tsawg dua los yog sib npaug rau 0.1 |
Tsawg dua los yog sib npaug rau 0.1 |
|
Hwj chim (50Hz) |
Kw |
7.5 |
7.5 |
9 |
15 |
|
Forced internal ncig cua txias |
GXR yog txawm peem rau nrog ib tug yuam kev nyob rau hauv lub voj voog txias, nrog lub siab tshaj plaws twj tso kua mis lub cev kub ntawm<50 ° C and a maximum motor temperature of<35 ° C |
||||
|
Voltage thiab zaus |
Haum rau lub ntiaj teb voltage thiab zaus |
||||
|
Inlet / qhov hluav taws xob interface |
Customizable flange interface / KF interface |
||||
|
Dej |
Siab (MPa) |
0.2-0.4 |
|||
|
Flow L/min |
0.1 |
||||
|
Qib (degree) |
3-5 |
||||
|
N2 |
Siab (MPa) |
10-30 |
|||
|
Flow L/min |
0.05-0.1 |
||||
|
Suab nrov |
Siab (MPa) |
6-20 |
|||
|
Qhov hnyav |
dB |
Tsawg dua los yog sib npaug li 70 |
Tsawg dua los yog sib npaug li 70 |
Tsawg dua lossis sib npaug li 72 |
Tsawg dua lossis sib npaug li 72 |
|
Saib xyuas thiab tswj |
Kg |
600 |
720 |
800 |
1350 |
|
SPEED (50Hz) |
Tswj vaj huam sib luag / nqus cov duab digital / ntsuas kub / ntsuas tam sim no / tswb ceeb toom / lwm yam kev pabcuam hauv network |
||||
Yam ntxwv:
Kev ua haujlwm tsis muaj paug paug:
Cov twj tso kua mis qhuav tsis tas yuav tsum muaj lubrication lossis sealing kua, tshem tawm qhov kev pheej hmoo ntawm kev kis kab mob hauv lub tshuab nqus tsev. Qhov no yog qhov tseem ceeb rau kev tswj xyuas qhov purity ntawm qhov chaw tsim khoom semiconductor.
High Pumping Ceev:
Cov twj tso kua mis qhuav muaj peev xwm ua tiav cov twj tso kua mis siab, ua rau lawv zoo rau cov ntawv thov uas yuav tsum muaj kev khiav tawm sai sai, xws li hauv kev ua semiconductor.
Low Maintenance Requirements:
Muab piv rau cov twj siv roj foob, cov twj tso kua mis qhuav muaj qhov xav tau kev saib xyuas qis dua vim lawv tsis cia siab rau cov roj rau kev ua haujlwm. Qhov no ua rau txo qis downtime thiab txuag nqi ntawm lub twj tso kua mis lub neej.
Zog Efficiency:
Cov twj tso kua mis qhuav yog tsim los rau kev siv hluav taws xob, pab cov tuam txhab semiconductor txo lawv cov kev siv hluav taws xob tag nrho thiab cov nqi khiav lag luam.
Kev khiav hauj lwm dav:
Cov twj tso kua mis no tuaj yeem ua haujlwm thoob plaws ntau qhov kev kub ntxhov, muab kev yooj yim hauv ntau cov txheej txheem tsim khoom semiconductor uas xav tau ntau lub tshuab nqus tsev.
Compact Design:
Cov twj tso kua mis qhuav feem ntau muaj cov qauv tsim, tso cai rau kev sib koom ua ke yooj yim rau hauv cov khoom siv semiconductor thiab txuag qhov chaw muaj txiaj ntsig hauv pem teb hauv chav huv.
Kev ntseeg tau:
Cov twj tso kua mis qhuav tau paub txog lawv txoj kev ntseeg siab thiab kev ua haujlwm ntev, muab kev ua haujlwm zoo ib yam nyob rau lub sijhawm thiab pab txhawb rau tag nrho kev ua haujlwm ntawm semiconductor kev lag luam.
Inpower Qhuav semiconductor nqus twj tso kua mis cheeb tsam:
Semiconductor Manufacturing:
Cov twj tso kua mis qhuav ua lub luag haujlwm tseem ceeb hauv ntau cov txheej txheem tsim khoom semiconductor, suav nrog tshuaj vapor deposition (CVD), lub cev vapor deposition (PVD), ion implantation, etching, thiab sputtering. Lawv pab tsim thiab tswj cov qib nqus tsev vacuum tseem ceeb rau cov txheej txheem no.
Thin Film Deposition:
Nyob rau hauv nyias zaj duab xis deposition cov tswv yim xws li sputtering thiab evaporation, qhuav ntsia hlau twj yog siv los tshem tawm cov txheej txheem chamber thiab tuav lub nqus tsev vacuum tej yam kev mob rau depositing nyias films ntawm substrates.
Wafer processing:
Cov twj tso kua mis qhuav yog ua hauj lwm hauv wafer ua cov kauj ruam xws li tu, qauv, thiab doping, qhov uas tswj kom huv si thiab qhuav nqus tsev vacuum yog ib qho tseem ceeb rau kev ua tiav cov txiaj ntsig zoo thiab txhim khu kev qha.
Cim npe nrov: Tuam Tshoj qhuav semiconductor nqus tsev vacuum twj tso kua mis manufacturers, lwm tus neeg, Hoobkas
