Ultra High Vacuum Mechanical Booster Pump
Ultra High Vacuum (UHV) Mechanical Booster Pumps (Cov Hauv Paus Booster Pumps) nce cov pa tawm hauv qhov tsawg- lub tshuab nqus tsev siab qhov twg muaj peev xwm siv tau siab thiab lub twj tso kua mis ceev - yuav tsum muaj sijhawm down.
Ua haujlwm nrog lub twj tso kua mis rov qab (xws li lub tshuab nqus tsev qhuav los yog lub tshuab nqus tsev twj), lub twj tso kua mis siv qhov zoo -txoj kev hloov tshuab hloov pauv roj los ntawm lub chamber sab mus rau theem rov qab. Qhov no ua rau muaj txiaj ntsig zoo rau kev siv ceev ceev hauv nruab nrab mus rau ultra- lub tshuab nqus tsev siab ntau.
Technical Specifications
|
Parameter |
Specification / Kev xaiv yuav tsum tau |
Kev xav txog engineering |
|
Yam khoom |
UHV Mechanical Booster Pump (Lub hauv paus ntsiab lus) |
Positive - hloov pauv siab -throughput booster |
|
Flange Standards |
ISO-K / ISO-F, CF Flanges, lossis Kev Cai |
Xaiv raws li kev coj ua thiab UHV foob kev ncaj ncees |
|
Pumping Speed Range |
Qauv- nyob ntawm (Saib rau kev ua haujlwm nkhaus) |
Yuav tsum tau xam ua ke nrog txoj kab kev coj ua |
|
Kev Ua Haujlwm Siab |
Nruab nrab Nqus Tsev mus rau Ultra High Vacuum (UHV) |
Tswj los ntawm tag nrho cov twj tsheb ciav hlau thiab chamber outgassing |
|
Backing Pump Matching |
Dry Pump, Rotary Vane, lossis Rotary Piston |
Lub peev xwm rov qab yuav tsum sib phim lub zog tso tawm |
|
Max sib txawv siab |
Qauv- tshwj xeeb tso cai siab txwv (Delta P max) |
Tiv thaiv thermal overload thiab mechanical strain |
|
Nqus -Side Materials |
Stainless hlau, kho Alloys, tshwj xeeb txheej |
Tsawg outgassing tus nqi thiab tshuaj tiv thaiv |
|
Sealing Configuration |
Elastomer (FKM/FFKM) los yog Hlau Seals (CF) |
Xaiv raws li helium leak rate thiab txwv kev ci |
|
Helium Leak Rate |
Txog li 1 x 10^-10 mbar L/s |
Txheeb xyuas los ntawm huab hwm coj spectrometer leak detector |
Kev Xaiv & Kev Sib Txuas Lus Qhia
Txhawm rau xaiv qhov tseeb Roots booster twj tso kua mis thiab xyuas kom meej kev sib koom ua ke rau hauv koj lub tshuab nqus tsev, ntsuas cov ntsiab lus hauv qab no:
Pumping Speed & Target Pressure:Xam qhov xav tau kom siv tau zoo nrawm ntawm chamber inlet, coj cov kav dej coj mus rau hauv tus account.
Gas Load & Txheej Txheem Media:Txheeb xyuas cov txheej txheem roj muaj pes tsawg leeg, corrosive zog, plua plav hais, thiab cov khoom tawm ntawm cov khoom.
Backing Pump Compatibility:Xyuas kom lub twj tso kua mis rov qab tuav lub ntim ntim tsis pub dhau qhov siab tshaj qhov sib txawv siab (Delta P max).
Thermal & System Interlocks:Configure lub siab hloov pauv, hloov pauv zaus tsav (VFD), thiab kev sib cuam tshuam txias kom tsis txhob muaj cov khoom siv ntau dhau thaum lub sij hawm roughing.
Tej kev siv
Semiconductor thiab Electronics:Kev khiav tawm thiab cov txheej txheem roj tuav rau etch, CVD, thiab lithography txhawb cov cuab yeej uas yuav tsum tau muaj kev sib kis tsawg.
Nyias - Zaj duab xis Deposition & Txheej:Ua haujlwm ruaj khov thaum lub sij hawm siab -throughput PVD, sputtering, thiab optical txheej txheej txheem.
Kev tshawb fawb Laboratories:Siab -Kev ntseeg siab ntawm lub tshuab nqus tsev ua haujlwm rau particle physics, kev tshawb fawb saum npoo av, thiab qhov chaw simulation chambers.
Nqus Furnaces & Processing:Ua haujlwm tau zoo ntawm cov roj av hnyav thaum lub sijhawm siab -kub degassing, nqus brazing, thiab kho cua sov.
Kev Tswj Xyuas Zoo & Cov Ntaub Ntawv
UHV kev ntseeg siab yuav tsum muaj kev tsim khoom nruj thiab pov thawj cov qauv:
Cleanroom Processing:Multi-theem ultrasonic tu, hnyav degreasing, thiab plua plav-dawb ntim kom ntseeg tau tias qis qis.
Kev Xeem Precision:Dynamic rotor ntsuas, ntsuas qhov ntev, thiab ntsuas huab hwm coj helium xau kuaj.
Cov ntaub ntawv xa tuaj:Qauv- tshwj xeeb cov twj tso kua mis nrawm, CAD / STEP cov duab kos duab, lub cev muaj zog hluav taws xob specs, cov ntaub ntawv pov thawj, thiab cov ntawv ceeb toom xau.
FAQ
Q: Lub luag haujlwm tseem ceeb ntawm Ultra High Vacuum Mechanical Booster Pump yog dab tsi?
A: Ultra High Vacuum Mechanical Booster Pump ua rau kom muaj txiaj ntsig zoo ntawm kev siv lub tshuab nqus tsev thiab cov pa tawm hauv qhov qis - lub tshuab nqus tsev siab. Nws hloov cov pa roj los ntawm lub tshuab nqus tsev mus rau lub twj tso kua mis rov qab, ua rau kev khiav tawm sai thiab ua haujlwm siab dua qhov kawg.
Q: Puas muaj lub hauv paus tshuab twj tso kua mis ua haujlwm ntawm nws tus kheej yam tsis muaj lub twj tso kua mis rov qab?
A: Tsis yog. Ib lub twj tso kua mis mechanical yuav tsum muaj lub twj tso kua mis rov qab tsim nyog (xws li lub twj tso kua mis qhuav lossis lub twj tso kua mis rotary vane) kom tso pa tawm mus rau hauv huab cua.
Q: Vim li cas kuv thiaj li yuav tsum tsis txhob xaiv lub twj tso kua mis raws li qhov nominal siv ceev?
A: Nominal pumping speed sawv cev rau qhov zoo tshaj plaws kev hloov pauv yam tsis muaj kev suav nyiaj rau qhov tseeb - ntiaj teb kev poob. Kev ua tau zoo tiag tiag yog nyob ntawm lub tshuab nqus tsev- kab conductance, rov qab twj tso kua mis, kev khiav hauj lwm siab, thiab chamber gas load.
Q: Kuv yuav tiv thaiv thermal overload thaum lub sij hawm lub twj tso kua mis ua haujlwm li cas?
A: Thermal overload tiv thaiv los ntawm kev tswj cov kev khiav hauj lwm siab nyob rau hauv qhov tso cai sib txawv txwv (Delta P max). Siv lub valve nyem nyem, qhov sib txawv zaus tsav (VFD), lossis hloov siab los tswj kev pib pib-nce tiv thaiv lub twj tso kua mis los ntawm cov pa roj ntau dhau.
Q: Yuav ua li cas tiv thaiv kev huv ntawm UHV thaum tsim khoom?
A: Rau kev pabcuam UHV, lub tshuab nqus tsev - cov khoom siv sab nraud tau txais kev tu tshwj xeeb, xws li ultrasonic degreasing, kom tshem tawm cov khoom seem ntawm hydrocarbon.
Cim npe nrov: Tuam Tshoj Ultra siab nqus tshuab nqus tsev twj tso kua mis, Tuam Tshoj Ultra siab nqus tshuab nqus tsev twj tso kua mis manufacturers, lwm tus neeg, Hoobkas
