InPower Roj tsis muaj lub tshuab nqus tsev twj tso kua mis yog los ntawm kev tsav tsheb & tsav rotor rotating kom loj lub kaw qhov nqus kom nqus tau pa. Tom qab lub twj tso kua mis nkag mus rau hauv lub twj tso kua mis chamber, lub kaw seem yuav txav los ntawm suction kawg mus rau qhov xaus nrog rau kev tsav tsheb & tsav rotor kev sib hloov, lub siab nce tsis tu ncua thiab tsis muaj qhov tshwm sim nruab nrab ntawm qhov tso tawm.Thaum qhov chaw kaw tau txuas nrog qhov chaw nres nkoj tawm, gas nyob rau hauv qhov kev tso tawm yog rov qab mus rau hauv lub twj tso kua mis chamber, ua rau cov pa roj siab thiab kub nyob rau hauv lub twj tso kua mis chamber nce, thiab ua airflow suab nrov. Nrog rau lub twj tso kua mis txuas ntxiv ua hauj lwm, ntim ntawm ntim qhov chaw pib ua me thiab me thiab cov roj nyob rau hauv lub twj tso kua mis chamber tsis tu ncua tso tawm.Muaj pub dawb-roj lubrication rau lub twj tso kua mis chamber . Yog li nws tuaj yeem tau txais lub tshuab nqus tsev huv. Anti-corrosion yuav tsum tau ua thaum ntsia hlau lub tshuab nqus tsev twj nqus corrosive gases.
Nta:
Cov qauv rotor ntau dua, cov kev xav tau siab dua, kev ua haujlwm rotor nyuaj dua thiab lub sijhawm ua haujlwm ntev dua; Tib lub sijhawm, qhov sib txawv ntawm cov hlau lead lub tshuab nqus tsev twj tso kua mis nrog lub zog ua haujlwm me me, qis suab nrov thiab qis dua ntawm lub twj tso kua mis khiav.
inPower Oil free ntsia hlau nqus twj tso kua mis Technical parameters:
Qauv: LGG30/50/70/110/150/180/200/220/270/300/360/400/500
Lub tshuab nqus tsev qhov kawg: Tsawg dua lossis sib npaug rau 1Pa
Ceev 50 Hz: 30-500 L/s
Ceev 60 Hz: 36 - 600 L/s
|
Qauv |
LGG 30 |
LGB 50 |
LGG 70 |
LGB110 |
LGB 150 |
LG 180 |
LGB 200 |
LG220 |
LG270 |
LG 300 |
LG360 |
LGG400 |
LGB 500 |
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|
SPEED (50Hz) |
L/s |
30 |
50 |
83 |
110 |
150 |
180 |
200 |
230 |
270 |
300 |
360 |
360 |
500 |
|
|
m3/h |
110 |
180 |
300 |
400 |
540 |
650 |
720 |
830 |
970 |
1080 |
1300 |
1500 |
1800 |
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|
Qhov kawg nqus tsev vacuum (50Hz) |
Pa |
5 |
5 |
5 |
5 |
5 |
5 |
5 |
5 |
5 |
5 |
5 |
5 |
5 |
|
|
Maximum tso siab |
bar |
1.2 |
1.2 |
1.2 |
1.2 |
1.2 |
1.2 |
1.5 |
1.2 |
1.2 |
1.2 |
1.2 |
1.2 |
1.2 |
|
|
Hwj chim (50Hz) |
Kw |
4 |
4 |
5.5/7.5 |
11 |
15 |
15 |
18.5 |
18.5 |
22 |
30 |
37 |
37 |
37 |
|
|
Tsav ceev (50Hz) |
rpm ua |
2880 |
2880 |
2880 |
2880 |
2880 |
2880 |
2880 |
2880 |
2880 |
2880 |
2880 |
2880 |
2880 |
|
|
Txuas |
IN |
mm |
50 |
50 |
65 |
65 |
100 |
100 |
150 |
150 |
150 |
150 |
150 |
150 |
150 |
|
Tawm |
mm |
40 |
40 |
65 |
65 |
80 |
80 |
100 |
100 |
100 |
100 |
100 |
100 |
100 |
|
|
Dej |
Ntws |
L / min |
6 |
6 |
10 |
15 |
20 |
20 |
25 |
25 |
28 |
28 |
28 |
28 |
28 |
|
Siab |
MPa |
0.2-0.35 |
0.2-0.35 |
0.2-0.35 |
0.2-0.35 |
0.2-0.35 |
0.2-0.35 |
0.2-0.35 |
0.2-0.35 |
0.2-0.35 |
0.2-0.35 |
0.2-0.35 |
0.2-0.35 |
0.2-0.35 |
|
|
Txuas |
G3/8" |
G1/2" |
G1/2" |
G1/2" |
G1/2" |
G1/2" |
G1/2" |
G1/2" |
G1/2" |
G1/2" |
G1/2" |
G1/2" |
G1/2" |
||
|
Txoj kev txias |
Cua / Dej |
Cua / Dej |
Dej |
Dej |
Dej |
Dej |
Dej |
Dej |
Dej |
Dej |
Dej |
Dej |
Dej |
Dej |
|
|
Suab nrov |
dB |
75 |
75 |
75 |
76 |
76 |
78 |
78 |
78 |
80 |
80 |
85 |
85 |
85 |
|
|
Qhov hnyav |
Kg |
310 |
310 |
475 |
570 |
840 |
840 |
1200 |
1220 |
1250 |
1300 |
1350 |
1380 |
1400 |
|
|
Kev Cai Tshwj Xeeb |
Raws li qhov yuav tsum tau muaj, nws tuaj yeem teeb tsa nrog qhov sib txawv ntawm qhov sib txawv, tiv thaiv corrosion, tawg-pov thawj, thiab lwm yam |
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Nws yog qhov tsim nyog rau feem ntau daim ntawv thov nrog cov kev hloov pauv tshwj xeeb rau kev lag luam tshuaj thiab kev lag luam, nrog rau kev tsom mus rau kev lag luam tshuaj zoo thiab tshuaj.
Cov xwm txheej ntau lawm:
inPower LGB Roj dawb ntsia hlau lub tshuab nqus tsev twj tso kua mis cheeb tsam:
Metrology thiab Inspection Equipment:
Lub tshuab nqus tsev nyob rau hauv metrology thiab soj ntsuam cov cuab yeej siv nyob rau hauv semiconductor fabrication yuav tsum txhim khu kev qha twj tso kua mis kom tshem tawm cov chambers thiab xyuas kom meej kev ntsuas. Cov twj tso kua mis qhuav muab lub tshuab nqus tsev tsim nyog rau cov ntawv thov no.
Ion implantation:
Cov twj tso kua mis qhuav yog qhov tseem ceeb rau kev tsim thiab tswj lub tshuab nqus tsev siab hauv cov khoom siv ion implantation, uas yog siv los qhia dopant atoms rau hauv cov khoom siv semiconductor los hloov lawv cov khoom hluav taws xob.
Photolithography:
Nyob rau hauv cov txheej txheem photolithography, cov twj tso kua mis qhuav pab tshem tawm cov khoom siv hluav taws xob, kom ntseeg tau qhov hloov pauv ntawm cov qauv mus rau semiconductor wafers thaum lub sij hawm semiconductor fabrication txheej txheem.
Kev Tshawb Fawb thiab Kev Txhim Kho:
Cov twj tso kua mis qhuav kuj tseem siv rau hauv kev tshawb fawb thiab kev loj hlob hauv chaw soj nstuam hauv kev lag luam semiconductor rau kev sim cov txheej txheem tshiab, cov ntaub ntawv, thiab cov khoom siv hauv kev tswj lub tshuab nqus tsev.
Cim npe nrov: Tuam Tshoj roj free ntsia hlau nqus tsev vacuum twj tso kua mis manufacturers, lwm tus neeg, Hoobkas
